| Title |
Trends in SOI Technology: Hot and Green |
| ID_Doc |
31741 |
| Authors |
Cristoloveanu, S |
| Title |
Trends in SOI Technology: Hot and Green |
| Year |
2011 |
| Published |
Journal Of The Korean Physical Society, 58, 5 |
| DOI |
10.3938/jkps.58.1461 |
| Abstract |
The current status of Silicon-On-Insulator (SOT) technology and its near-future trends are reviewed. SOI is the subject of hot strategic debate with huge economic implications. SOT offers ample room for scaling, performance improvement, and innovations. SOT memories and logic circuits also provide substantial power savings for a green world. Several options and technology boosters for SOI will be discussed. They can infuse further gains in performance and miniaturization while enriching the circuits' functionality. Among several emerging applications, we address the context of capacitorless single-transistor Dynamic Random Access Memories (1T-DRAMs) and focus on two novel approaches. |
| Author Keywords |
SOT; CMOS; Microelectronics; Nanoelectronics; Strain; DRAM; 1T-DRAM |
| Index Keywords |
Index Keywords |
| Document Type |
Other |
| Open Access |
Open Access |
| Source |
Science Citation Index Expanded (SCI-EXPANDED); Conference Proceedings Citation Index - Science (CPCI-S) |
| EID |
WOS:000290636200001 |
| WoS Category |
Physics, Multidisciplinary |
| Research Area |
Physics |
| PDF |
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