| Title |
Oxidation and crystallization behavior of calcium europium silicon nitride thin films during rapid thermal processing |
| ID_Doc |
64554 |
| Authors |
de Jong, M; van Enter, VE; Schuring, EW; van der Kolk, E |
| Title |
Oxidation and crystallization behavior of calcium europium silicon nitride thin films during rapid thermal processing |
| Year |
2016 |
| Published |
|
| DOI |
10.1016/j.tsf.2016.01.055 |
| Abstract |
Luminescent thin films were fabricated on silicon wafers using reactive magnetron sputtering of Ca, Si and Eu in Ar/N-2 atmosphere. In order to activate the luminescence, the as-deposited nitride films were heated to 1100 degrees C by a rapid thermal processing treatment. X-ray diffraction measurements reveal the crystal phases that form during thermal treatment. By recording scanning electron microscopy images of the surface and the cross-section of the film at different radial locations, the formation of different layers with a thickness depending on the radial position is revealed. Energy dispersive x-ray spectroscopy analysis of these cross-sections reveals the formation of an oxide top layer and a nitride bottom layer. The thickness of the top layer increases as a function of radial position on the substrate and the thickness of the bottom layer decreases accordingly. The observation of different 4f(6)5d(1) -> 4f(7) Eu2+ luminescence emission bands at different radial positions correspond to divalent Eu doped Ca3Si2O4N2, Ca2SiO4 and CaSiO3, which is in agreement with the phases identified by X-ray diffraction analysis. A mechanism for the observed oxidation process of the nitride films is proposed that consists of a stepwise oxidation from the as-deposited amorphous nitride state to crystalline Ca3Si2O4N2, to Ca2SiO4 and finally CaSiO3. The oxidation rate and final state of oxidation show a strong temperature-time dependency during anneal treatment. (C) 2016 Elsevier B.V. All rights reserved. |
| Author Keywords |
Magnetron sputtering; Luminescent thin film; Rapid thermal processing; Divalent europium; Oxidation reaction |
| Index Keywords |
Index Keywords |
| Document Type |
Other |
| Open Access |
Open Access |
| Source |
Science Citation Index Expanded (SCI-EXPANDED) |
| EID |
WOS:000372794900055 |
| WoS Category |
Materials Science, Multidisciplinary; Materials Science, Coatings & Films; Physics, Applied; Physics, Condensed Matter |
| Research Area |
Materials Science; Physics |
| PDF |
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